TY  - BOOK
AU  - Eranna, Golla
TI  - Crystal growth and evaluation of silicon for vlsi and ulsi
SN  - 9781482232813
U1  - 661.0683 
PY  - 2015///
CY  - Boca Raton
PB  - CRC Press
KW  - Silicon  crystals
KW  - Silicon  crystals-Electric proporties
KW  - Cristal growth
ER  -