Bechtold, T <br/><br/>
Fast simulation of electro-thermal mems  efficient dynamic compact models 
T. Bechtold, E.B. Rudnyi and J.G. Korvink 
 - New York:  Springer,  27. 
 - xi, 180p 
<br/><br/> HB 
<br/><br/>Includes bibliographical references and index 
<br/><br/><br/>Eng 
<br/><br/><label>ISBN: </label>3-540-34612-0 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microtechnology and mems, 1439-6599
<br/><br/><label>Dewey Class. No.: </label>621.381  / BEF