Lyshevski, Sergey Edward <br/><br/>
Nano-and microelectromechanical systems  : fundamentals of nano-and microengineering 
Sergey Edward Lyshevski 
 - Boca Raton:  CRC,  2001. 
 - 338p. 
<br/><br/> HB 
<br/><br/><br/>Eng 
<br/><br/><label>ISBN: </label>084939166 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microeletromechanical systems
<br/><br/><label>Dewey Class. No.: </label>621.381  / LYN