Lee, Hong H. <br/><br/>
Fundamentals of microelectronics processing 
Hong H.Lee 
 - New York:  McGraw-Hill,  1990. 
 -  xvi, 514p. 
<br/><br/> PB 
<br/><br/><br/>Eng 
<br/><br/><label>ISBN: </label>0071007962 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits-Materials
<br/><br/><label>Dewey Class. No.: </label>621.3815  / LEF