000 00433nam a2200157Ia 4500
020 _a0803104596
082 _a621.38152
_bEME
245 _aEmerging semiconductor technology
_cEdited by Dinesh C. Gupta
260 _aPhiladelphia:
_bASTM,
_c1987.
300 _a704p.
500 _aHB
546 _aEng
650 _aSemiconductors-Design and construction-Congresses
_985610
700 _aGupta, Dinesh C. (ed.)
_985611
942 _cBK
999 _c11453
_d11453