| 000 | 00599nam a2200193Ia 4500 | ||
|---|---|---|---|
| 020 | _a3-540-34612-0 | ||
| 082 |
_a621.381 _bBEF |
||
| 100 |
_aBechtold, T _977597 |
||
| 245 |
_aFast simulation of electro-thermal mems _befficient dynamic compact models _cT. Bechtold, E.B. Rudnyi and J.G. Korvink |
||
| 260 |
_aNew York: _bSpringer, _c27. |
||
| 300 | _axi, 180p | ||
| 500 | _aHB | ||
| 504 | _aIncludes bibliographical references and index | ||
| 546 | _aEng | ||
| 650 |
_aMicrotechnology and mems, 1439-6599 _977598 |
||
| 700 |
_aKorvink, J.G _977599 |
||
| 700 |
_aRudnyi, E.B _977600 |
||
| 942 | _cBK | ||
| 999 |
_c26735 _d26735 |
||