| 000 | 00459nam a2200157Ia 4500 | ||
|---|---|---|---|
| 020 | _a084939166 | ||
| 082 |
_a621.381 _bLYN |
||
| 100 |
_aLyshevski, Sergey Edward _9169557 |
||
| 245 |
_aNano-and microelectromechanical systems _b: fundamentals of nano-and microengineering _cSergey Edward Lyshevski |
||
| 260 |
_aBoca Raton: _bCRC, _c2001. |
||
| 300 | _a338p. | ||
| 500 | _aHB | ||
| 546 | _aEng | ||
| 650 |
_aMicroeletromechanical systems _981624 |
||
| 942 | _cBK | ||
| 999 |
_c31588 _d31588 |
||