| 000 | 00403nam a2200157Ia 4500 | ||
|---|---|---|---|
| 020 | _a0071007962 | ||
| 082 |
_a621.3815 _bLEF |
||
| 100 |
_aLee, Hong H. _984438 |
||
| 245 |
_aFundamentals of microelectronics processing _cHong H.Lee |
||
| 260 |
_aNew York: _bMcGraw-Hill, _c1990. |
||
| 300 | _bxvi, 514p. | ||
| 500 | _aPB | ||
| 546 | _aEng | ||
| 650 |
_aIntegrated circuits-Materials _984439 |
||
| 942 | _cBK | ||
| 999 |
_c3460 _d3460 |
||