000 00521 a2200181 4500
020 _a0070397422
082 0 4 _a621.3817
_bHAN
100 1 _aMaissel, Leon I.
_932566
245 1 0 _aHandbook of thin film technology
_cLeon I. Maissel
260 _aNew York
_bMcgraw-Hill
_c1970
300 _aVarious pages.
500 _aHB
546 _aEng
650 4 _aMicroelectronics-Handbooks, manuals, etc
_932567
650 4 _aThin films-Handbooks, manuals, etc
_932568
700 1 _aGlang, Reinhard (ed.)
_932569
942 _cREF
999 _c41776
_d41776