Bechtold, T
Fast simulation of electro-thermal mems efficient dynamic compact models T. Bechtold, E.B. Rudnyi and J.G. Korvink - New York: Springer, 27. - xi, 180p
HB
Includes bibliographical references and index
Eng
3-540-34612-0
Microtechnology and mems, 1439-6599
621.381 / BEF
Fast simulation of electro-thermal mems efficient dynamic compact models T. Bechtold, E.B. Rudnyi and J.G. Korvink - New York: Springer, 27. - xi, 180p
HB
Includes bibliographical references and index
Eng
3-540-34612-0
Microtechnology and mems, 1439-6599
621.381 / BEF