Lyshevski, Sergey Edward
Nano-and microelectromechanical systems : fundamentals of nano-and microengineering Sergey Edward Lyshevski - Boca Raton: CRC, 2001. - 338p.
HB
Eng
084939166
Microeletromechanical systems
621.381 / LYN
Nano-and microelectromechanical systems : fundamentals of nano-and microengineering Sergey Edward Lyshevski - Boca Raton: CRC, 2001. - 338p.
HB
Eng
084939166
Microeletromechanical systems
621.381 / LYN